Machlin, E. S. <br/><br/>
Materials science in microelectronics / 
E.S. Machlin 
 - 2nd ed. 
 - Amsterdam :  Elsevier,  2005- 
 - 1 v. :  ill. ;  24 cm. 
<br/><br/>Includes index 
<br/><br/> The relationships between thin film processing and structure  vol. 1. 
<br/><br/><label>ISBN: </label>008044640X (v. 1)  RM575.85 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films<br/>Microelectronics