Campbell, Stephen A.,  1954- <br/><br/>
The science and engineering of microelectronic fabrication / 
Stephen A. Campbell 
 - 2nd ed. 
 - New York :  Oxford University Press,  2001 
 - xiv, 603 p. :  ill. ;  24 cm. 
 - The Oxford series in electrical and computer engineering .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0195136055  RM84.90 
<br/><br/><label>LCCN: </label>00-051022 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction