Principles and applications of NanoMEMS physics - Santos, Hector J. de los. (Dordrecht, Netherlands : Springer, 2005)
Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave-phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics.
Includes index and references : p. 241-252.
Keywords: Quantum electronics; Wave-particle duality; Nanotechnology; Microelectromechanical systems