Principles and applications of NanoMEMS physics / 
edited by Hector De Los Santos. 
 - Dordrecht, Netherlands :  Springer,  2005. 
 - vx, 254 p. :  ill. ;  24 cm. 
 - Microsystems ;  v. 15. .
 - Microsystems (Series) ;  v. 15. .
<br/><br/>Includes index and references : p. 241-252. 
<br/><br/>Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave-phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics. 
<br/><br/><label>ISBN: </label>1402032382  RM414.74 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Quantum electronics.<br/>Wave-particle duality.<br/>Nanotechnology.<br/>Microelectromechanical systems.