TY  - BOOK
AU  - Sherer,J.Michael
TI  - Semiconductor industry: wafer fab exhaust management 
SN  - 1574447203 (alk. paper)
PY  - 2005///
CY  - Boca Raton
PB  - CRC/Taylor & Francis
KW  - Semiconductor wafers
KW  - Design and construction
KW  - Semiconductor industry
KW  - Environmental aspects
KW  - Volatile organic compounds
KW  - Air
KW  - Purification
KW  - Technological innovations
N1  - Includes bibliographical refrences and index
ER  -