TY  - BOOK
AU  - Beeby,Stephen
TI  - MEMS mechanical sensors
T2  - Artech House microelectromechanical system series
SN  - 1580535364
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
KW  - Detectors
N1  - Includes bibliographical references and index
ER  -