TY  - BOOK
AU  - Chang,C.-Y.
AU  - Sze,S.M.
TI  - ULSI devices
SN  - 0471240672 (alk. paper)
PY  - 2000///
CY  - New York
PB  - Wiley
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Semiconductors
N1  - 'A Wiley-Interscience publication.'; Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/bios/wiley047/99029979.html
UR  - http://www.loc.gov/catdir/description/wiley032/99029979.html
UR  - http://www.loc.gov/catdir/toc/onix02/99029979.html
ER  -