Predictive simulation of semiconductor processing :  status and challenges / 
J. Dabrowski, E.R. Weber (eds.). 
 - Berlin :  Springer-Verlag,  2004. 
 - xvii, 490 p. :  ill. (some col.) ;  24 cm. 
 - Springer series in materials science,  72  0933-033X ; .
 - Springer series in materials science ;  v. 72. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>3540204814 (acid-free paper)  RM690.03 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Simulation methods.<br/>Microelectronics--Technological innovations.