TY  - BOOK
AU  - Baltes,Henry
TI  - Enabling technology for MEMS and nanodevices
SN  - 352730746X
PY  - 2004///
CY  - Weinheim
PB  - Wiley VCH
KW  - Nanotechnology
KW  - Molecular electronics
KW  - Nanostructured materials
ER  -