Enabling technology for MEMS and nanodevices / edited by H. Baltes...[et. al] - Weinheim : Wiley VCH, 2004 - 427 p. : ill. ; 25 cm. - Advanced micro & nanosystems ; v.1 . ISBN: 352730746X RM 920.38 Subjects--Topical Terms: NanotechnologyMolecular electronicsNanostructured materials