Franssila, Sami. <br/><br/>
Introduction to microfabrication / 
Sami Franssila. 
 - Chichester, West Sussex, England :  John Wiley & Sons,  2004. 
 - xvii, 401 p. :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0470851058 (cloth)  RM482.40 0470851066 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electronic apparatus and appliances.<br/>Microfabrication.