Horne, Douglas F. 1915-

Microcircuit production technology / Douglas F. Horne. - Bristol [Avon] ; Boston : A. Hilger, 1986 - ix, 150 p. : ill. ; 29 cm.

Includes indexes.

Bibliography : p. 143-145.

0852744889

86-197761


Integrated circuits--Very large scale integration--Design and construction.