TY  - BOOK
AU  - Strausser,Yale
TI  - Characterization in silicon processing
SN  - 0750691727
PY  - 1993///
CY  - Boston
PB  - Butterworth-Heinemann
KW  - Silicon
KW  - Electric conductors
KW  - Semiconductor films
KW  - Surface chemistry
N1  - includes bibliographical references and index
ER  -