Characterization in silicon processing / 
editor, Yale Strausser ; consulting editors, C. R. Brundle and Gary E. McGuire ; managing editor, Lee E. Fitzpatrick 
 - Boston :  Butterworth-Heinemann,  1993 
 - 240 p. :  ill. ;  24 cm. 
 - Materials characterization series .
<br/><br/>includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0750691727  RM226.82 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon<br/>Electric conductors<br/>Semiconductor films<br/>Surface chemistry