TY  - BOOK
AU  - Lemkin,Mark Alan
TI  - Micro accelerometer design with digital feedback control
PY  - 1997///
CY  - Barkeley
PB  - University of California
KW  - University of California, Berkeley
KW  - Dissertations
KW  - Accelerometers
KW  - Microelectromechanical systems
KW  - Dissertations, Academic
KW  - United States
N1  - Thesis (Ph.D.) - University of California, Barkeley, 1997; Bibliography : p. 109-114
ER  -