Micro accelerometer design with digital feedback control /
by Mark Alan Lemkin
- Barkeley : University of California, 1997
- vii, 114 p. : ill.; 18 cm.
Thesis (Ph.D.) - University of California, Barkeley, 1997
Bibliography : p. 109-114
RM252.78
University of California, Berkeley--Dissertations
Accelerometers Microelectromechanical systems Dissertations, Academic--United States