Lemkin, Mark Alan

Micro accelerometer design with digital feedback control / by Mark Alan Lemkin - Barkeley : University of California, 1997 - vii, 114 p. : ill.; 18 cm.

Thesis (Ph.D.) - University of California, Barkeley, 1997

Bibliography : p. 109-114

RM252.78


University of California, Berkeley--Dissertations


Accelerometers
Microelectromechanical systems
Dissertations, Academic--United States