Jaeger, Richard C. <br/><br/>
Introduction to microelectronic fabrication / 
Richard C. Jaeger 
 - 2nd ed. 
 - Upper Saddle River, N.J. :  Prentice Hall,  2002 
 - xiv, 316 p. :  ill. ;  24 cm. 
 - Modular series on solid state devices ;  v. 5 .
 - Modular series on solid state devices (Upper Saddle River, N.J.) ;  v. 5 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0201444941  RM176.88 9780201444940 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration--Design and construction--Textbooks