TY  - BOOK
AU  - Fujita,Hiroyuki
TI  - Micromachines as tools for nanotechnology
SN  - 354000856X
PY  - 2003///
CY  - Berlin
PB  - Springer
KW  - Nanotechnology
KW  - Microelectromechanical systems
N1  - Includes bibliographical references
ER  -