TY  - BOOK
AU  - Pauleau,Yves
TI  - Chemical physics of thin film deposition processes for micro- and nano-technologies
SN  - 1402005245 (alk. paper)
PY  - 2002///
CY  - Dordrecht
PB  - Kluwer Academic Publishers
KW  - Thin films
KW  - Congresses
KW  - Nanotechnology
N1  - 'Published in cooperation with NATO Scientific Affairs Division.'; Includes bibliographical references and index
ER  -