Chemical physics of thin film deposition processes for micro- and nano-technologies / 
edited by Yves Pauleau 
 - Dordrecht :  Kluwer Academic Publishers,  2002 
 - xiii, 363 p. :  ill. ;  25 cm. 
 - NATO science series.  Series II,  Mathematics, physics, and chemistry ;  v. 55 .
<br/><br/> 'Published in cooperation with NATO Scientific Affairs Division.' 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>1402005245 (alk. paper)  RM627.12 
<br/><br/><label>LCCN: </label>2002-072962 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films--Congresses<br/>Nanotechnology--Congresses