TY - BOOK AU - Santos,Hector J.de los TI - Introduction to microelectromechanical (MEM) microwave systems SN - 089006282X (alk. paper) AV - TK7876 .S28 1999 U1 - 621.381/3 21 PY - 1999/// CY - Boston PB - Artech House KW - Microwave devices KW - Microelectromechanical systems N1 - Bahan out of print - tak minta dari PSPP sebab permintaan pelajar; Includes bibliographical references and index ER -