Hsu, Tai-Ran. <br/><br/>
MEMS and microsystems :  design and manufacture / 
Tai-Ran Hsu. 
 - Boston :  McGraw-Hill,  2002. 
 - xii, 436 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references (p. 427-431) and index. 
<br/><br/><label>ISBN: </label>0072393912 (alk. paper)  RM448.47 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Microelectromechanical systems.<br/>Microelectronic packaging.