Gardner, Julian W.  1958- <br/><br/>
Microsensors, MEMS, and smart devices / 
Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. 
 - Chichester :  John Wiley & Sons,  2001. 
 - xvi, 503 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>
<br/><br/><label>ISBN: </label>047186109X (alk. paper)  RM321.40 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Detectors.<br/>Intelligent control systems.