TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - Nano- and microelectromechanical systems: fundamentals of nano- and microengineering 
SN  - 0849309166 (alk. paper)
PY  - 2001///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -