Lyshevski, Sergey Edward <br/><br/>
Nano- and microelectromechanical systems :  fundamentals of nano- and microengineering / 
Sergey Edward Lyshevski 
 - Boca Raton :  CRC Press,  2001 
 - 338 p. :  ill. ;  24 cm. 
 - Nano- and microscience, engineering, technology, and medicine series .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849309166 (alk. paper)  RM377.68 
<br/><br/><label>LCCN: </label>00-057953 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems