Fundamentals of microfabrication : the science of miniaturization - Madou, Marc J. (Boca Raton : CRC Press, 2002)
Includes bibliographical references and index
Buku bacaan asas fakulti
Keywords: Microelectronics; Integrated circuits -- Design and construction; Microelectromechanical systems -- Design and construction; Machining; Microelectronic packaging; Lasers -- Industrial applications