TY  - BOOK
AU  - Gad-el-Hak,Mohamed
TI  - The MEMS handbook
SN  - 0849300770
PY  - 2002///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Mechanical engineering
KW  - Handbooks, manuals, etc
N1  - Includes bibliographical references and index
ER  -