The MEMS handbook / 
edited by Mohamed Gad-el-Hak. 
 - Boca Raton, FL :  CRC Press,  2002. 
 - 1 v. (various pagings) :  ill. ;  26 cm. 
 - The Mechanical engineering handbook series .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0849300770  RM602.80 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical engineering--Handbooks, manuals, etc.