TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - MEMS and NEMS: systems, devices, and structures 
SN  - 0849312620 (hc.)
PY  - 2002///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -