Lyshevski, Sergey Edward. <br/><br/>
MEMS and NEMS :  systems, devices, and structures / 
Sergey Edward Lyshevski. 
 - Boca Raton, FL :  CRC Press,  2002. 
 - 461 p. :  ill. ; 
 - Nano- and microscience, engineering, technology, and medicine series. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0849312620 (hc.)  RM401.80 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.