TY  - BOOK
AU  - Morgan,D.V.
AU  - Board,K.
TI  - An introduction to semiconductor microtechnology
SN  - 0471924784
PY  - 1990///
CY  - Chichester, New York
PB  - John Wiley & Sons
KW  - Semiconductors
KW  - Design and construction
N1  - Pesanan Sementara: INTRABAKTI (Buku teks) - Peruntukan 2007; Includes bibliographical references
ER  -