Morgan, D. V. An introduction to semiconductor microtechnology / D. V. Morgan, K. Board. - 2nd ed. - Chichester ; New York : John Wiley & Sons, 1990. - xiv, 208 p. : ill. ; 24 cm. Pesanan Sementara: INTRABAKTI (Buku teks) - Peruntukan 2007 Includes bibliographical references. ISBN: 0471924784 RM11.30 (xeroxcopy) LCCN: 89-070572 Subjects--Topical Terms: Semiconductors--Design and construction.