TY  - BOOK
AU  - Tompkins,Harland G.
TI  - A user's guide to ellipsometry
SN  - 0126939500
PY  - 1993///
CY  - Boston, Mass.
PB  - Academic Press
KW  - Ellipsometry
KW  - Case studies
N1  - Includes bibliographical references and index
ER  -