TY  - BOOK
AU  - Poate,J.M.,1940-
AU  - Tu,K.N.
AU  - Mayer,J.W.(James W.),1930-
TI  - Thin films-interdiffusion and reactions
SN  - 0471022381
PY  - 1978///
CY  - New York
PB  - Wiley
KW  - Thin films
KW  - Semiconductors
N1  - 'A Wiley-Interscience publcation; Includes bibliographical references
ER  -