TY  - BOOK
AU  - Klabunde,Kenneth J.
TI  - Thin films from free atoms and particles
SN  - 0124107567
PY  - 1985///
CY  - Orlando, Fla.
PB  - Academic Press
KW  - Thin films
KW  - Layer structure (Solids)
KW  - Crystal growth
KW  - Atom
KW  - Particles
N1  - Includes index
ER  -