Moreau, Wayne M. <br/><br/>
Semiconductor lithography:  principles, practices, and materials / 
Wayne M. Moreau. 
 - New York:  Plenum Press,  1988. 
 - 931 p. :  ill. ;  26 cm. 
<br/><br/><label>ISBN: </label>0306421852 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Semiconductors.<br/> Photoesists.