TY  - BOOK
AU  - Thompson,L.F.(Larry F.),1944-
AU  - Willson,C.Grant,1938-
AU  - Tagawa,Seiichi
ED  - American Chemical Society.
ED  - American Chemical Society.
TI  - Polymers for microelectronics: resists and dielectrics 
T2  - ACS symposium series
SN  - 0841227217
PY  - 1994///
CY  - Washington, D.C.
PB  - American Chemical Society
KW  - Microelectronic
KW  - Materials
KW  - Congresses
KW  - Polymers
N1  - 'Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society at the 203rd Meeting of the American Chemical Society, San Francisco, Calif., April 5-10, 1992'
ER  -