Polymers for microelectronics : resists and dielectrics - Thompson, L. F. (Larry F.), 1944-; Willson, C. Grant, 1938-; Tagawa, Seiichi; American Chemical Society. Division of Polymeric Materials: Science and Engineering; American Chemical Society. Meeting 1992 : San Francisco, Calif.) (Washington, D.C. American Chemical Society, 1994)
'Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society at the 203rd Meeting of the American Chemical Society, San Francisco, Calif., April 5-10, 1992'.
Keywords: Microelectronic -- Materials -- Congresses; Polymers