Polymers for microelectronics :  resists and dielectrics / 
Larry F. Thompson, C. Grant Willson, Seiichi Tagawa. 
 - Washington, D.C.  American Chemical Society  1994. 
 - 517 p. :  ill. ;  24 cm. 
 - ACS symposium series  537.  0097-6156 .
<br/><br/> 'Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society at the 203rd Meeting of the American Chemical Society, San Francisco, Calif., April 5-10, 1992'. 
<br/><br/><label>ISBN: </label>0841227217 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronic--Materials--Congresses.<br/>Polymers.