TY  - BOOK
ED  - National Research Council (U.S.). Panel on Plasma Processing of Materials.
TI  - Plasma processing of materials: scientific opportunities and technological challenges 
SN  - 0309045975
PY  - 1991///
CY  - Washington, D. C.
PB  - National Academy Press
KW  - Plasma engineering
KW  - Materials
ER  -