Plasma processing of materials :  scientific opportunities and technological challenges / 
Panel on Plasma Processing of Materials, National Research .Council 
 - Washington, D. C. :  National Academy Press,  1991. 
 - 75 pages ;  28 cm. 
<br/><br/><label>ISBN: </label>0309045975 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering.<br/>Materials.