TY  - BOOK
AU  - Elliott, David J.
TI  - Microlithography: process technology for ic fabrication 
SN  - 0070193045
PY  - 1986///
CY  - New York
PB  - Mc Graw-Hill Book Company
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Microlithography
KW  - Photo resists
ER  -