Elliott, David J. <br/><br/>
Microlithography :  process technology for ic fabrication / 
David J. Elliott. 
 - New York :  Mc Graw-Hill Book Company,  1986. 
 - 378 p. :  ill. ;  26 cm. 
<br/><br/><label>ISBN: </label>0070193045 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration--Design and construction.<br/>Microlithography.<br/>Photo resists.