TY  - BOOK
AU  - Craievich,Aldo
AU  - Bezerra,G.Gerson de Souza
AU  - Baranauskas,Victor
TI  - Microlithography: high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 
SN  - 9810201370
PY  - 1990///
CY  - Singapore
PB  - World Scientific
KW  - Microlithography
KW  - Congresses
KW  - Microelectronics
ER  -