Microlithography : high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 - Craievich, Aldo.; Bezerra, G. Gerson de Souza; Baranauskas, Victor (Singapore : World Scientific, 1990)
Keywords: Microlithography -- Congresses; Microelectronics -- Congresses