Microlithography :  high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28 - Sept. 1, 1989 / 
editors, Aldo Craievich, G. Gerson Bezerra de Souza, Victor Baranauskas. 
 - Singapore :  World Scientific,  1990. 
 - 184 p. ;  26 cm. 
<br/><br/><label>ISBN: </label>9810201370 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography--Congresses.<br/>Microelectronics--Congresses.