Grovenor, C. R. M. <br/><br/>
Materials for semiconductor devices 
C. R. M. Grovenor 
 - London :  The Institute of Metals ,  1987 
 - 165 p. ;  21 cm. 
<br/><br/><label>ISBN: </label>0904357821 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor films