TY  - BOOK
ED  - International Symposium on Ion Implantation Semiconductors and Other Materials
ED  - Crowder, Billy L.
TI  - Ion implantation in semiconductors and other materials
T2  - The IBM research symposia series
SN  - 0306307561
PY  - 1973///
CY  - New York
PB  - Plenum Press
KW  - Ion implantation
KW  - Congresses
KW  - Semiconductors
N1  - Includes bibliographical references
ER  -