TY  - BOOK
AU  - Morgan,D.V.
AU  - Board,K.
TI  - An introduction to semiconductor microtechnology
SN  - 0471901482
PY  - 1983///
CY  - Chichester
PB  - John Wiley & Sons
KW  - Microelectronics
KW  - Semiconductors
N1  - 'A Wiley-Interscience publication.'
ER  -