Morgan, D. V. <br/><br/>
An introduction to semiconductor microtechnology / 
D. V. Morgan, K. Board. 
 - Chichester :  John Wiley & Sons,  1983. 
 - 167 p. :  ill. ;  23 cm. 
<br/><br/> 'A Wiley-Interscience publication.' 
<br/><br/><label>ISBN: </label>0471901482 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Semiconductors.